Document Type

Article

Department

Physics (Pomona)

Publication Date

1-1-1996

Keywords

Amorphous state; Defect states; Hydrogenation; Microstructure; Nanostructures; Silicon; Scanning tunneling microscopy (STM)

Abstract

Particles of 2–14 nm diameter, representing 10(– 4)–10(– 3) of the film volume, are observed by scanning tunneling microscopy (STM) in thin films of hydrogenated amorphous silicon (a-Si:H) grown by rf-plasma-enhanced deposition using optimized conditions. The particles are produced in the discharge and incorporated in the film during growth, in contradiction to expected particle trapping by discharge sheath fields. The interfaces between the nanoparticles and the homogeneous film can produce low-density regions that form electronic defects in a-Si:H films.

Comments

Previously linked to as: http://ccdl.libraries.claremont.edu/u?/irw,218

Rights Information

© 1996 David M. Tanenbaum

Terms of Use & License Information

Terms of Use for work posted in Scholarship@Claremont.

Share

COinS
 
 
 
/