Open Access Senior Thesis
Bachelor of Science
Physics & Astronomy
© 2004 Regina C. Carns
In an age in which the microchip is ubiquitous, the rewards for novel methods of microfabrification are great, and the vast possibilities of nanotechnology lie just a little ahead. Various methods of microlithography offer differing benefits, and even as older techniques such as optical lithography are being refined beyond what were once considered their upper limits of resolution, new techniques show great promise for going even further once they reach their technological maturity. Recent developments in optical lithography may allow it to break the 100-nm limit even without resorting to x-rays.
Carns, Regina C., "Patterning Polymer Thin Films: Lithographically Induced Self Assembly and Spinodal Dewetting" (2004). Pomona Senior Theses. 16.