Graduation Year
2004
Document Type
Open Access Senior Thesis
Degree Name
Bachelor of Science
Department
Physics & Astronomy
Reader 1
David Tanenbaum
Terms of Use & License Information
Rights Information
© 2004 Regina C. Carns
Abstract
In an age in which the microchip is ubiquitous, the rewards for novel methods of microfabrification are great, and the vast possibilities of nanotechnology lie just a little ahead. Various methods of microlithography offer differing benefits, and even as older techniques such as optical lithography are being refined beyond what were once considered their upper limits of resolution, new techniques show great promise for going even further once they reach their technological maturity. Recent developments in optical lithography may allow it to break the 100-nm limit even without resorting to x-rays.
Recommended Citation
Carns, Regina C., "Patterning Polymer Thin Films: Lithographically Induced Self Assembly and Spinodal Dewetting" (2004). Pomona Senior Theses. 16.
https://scholarship.claremont.edu/pomona_theses/16
Comments
Previously linked to as: http://ccdl.libraries.claremont.edu/u?/stc,5
OCLC number: 549439165