Graduation Year


Document Type

Open Access Senior Thesis

Degree Name

Bachelor of Science


Physics & Astronomy

Reader 1

David Tanenbaum

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© 2004 Regina C. Carns


In an age in which the microchip is ubiquitous, the rewards for novel methods of microfabrification are great, and the vast possibilities of nanotechnology lie just a little ahead. Various methods of microlithography offer differing benefits, and even as older techniques such as optical lithography are being refined beyond what were once considered their upper limits of resolution, new techniques show great promise for going even further once they reach their technological maturity. Recent developments in optical lithography may allow it to break the 100-nm limit even without resorting to x-rays.


Previously linked to as:,5

OCLC number: 549439165